Optical monitoring system for thin film coating
matus-Coating develops spectral solutions for industrial customers and scientific applications.
We deliver customized Optical Monitoring System (OMS) for thin film coatings and provide complete integration and full automation of deposition process.
Broadband monitoring: Spectrometer based
- 380 — 1100 nm
- 380 — 1650 nm
- 200 — 400 nm (optional)
- 1500 — 2700 nm (optional)
Single wavelength monitoring: Monochromator based, Laser based
- 380 — 1100 nm
- 380 — 1650 nm
- 380 — 2500 nm
- 180 — 400 nm (optional)
- 2500 — 3500 nm (optional)
- 2500 — 5200 nm (optional)
Spectrometer
Monochromator
Spectrograph
Laser
Spectrometer
- Monitoring techniques – Broadband
- End-point calculation – Thickness re-engineering
- Self-compensation for quarter-wave designs – no
- On-line characterization – yes
- On-line optimization – yes
- Noise level – High
- Average number of layers (Depends on spectral range and coating design) – < 40-50
- Price – Low
Monochromator
- Monitoring techniques – Monochromatic
- End-point calculation – Pre-calculated data
- Self-compensation for quarter-wave designs – yes
- On-line characterization – no
- On-line optimization – no
- Noise level – Low
- Average number of layers (Depends on spectral range and coating design) – >50
- Price – Middle
Spectrograph
- Monitoring techniques – Monochromatic/Broadband
- End-point calculation – Pre-calculated data
- Self-compensation for quarter-wave designs – yes
- On-line characterization – yes
- On-line optimization – yes
- Noise level – High/Low
- Average number of layers (Depends on spectral range and coating design) – >50
- Price – Middle
Laser
- Monitoring techniques – Monochromatic
- End-point calculation – Pre-calculated data
- Self-compensation for quarter-wave designs – yes
- On-line characterization – no
- On-line optimization – no
- Noise level – Extremely Low
- Average number of layers (Depends on spectral range and coating design) – > 150
- Price – High