Vacuum coating systems for Fine and Precision Optics
MC-IAD-PO
Characteristics
Evaporation materials
Coatings
Applications
Characteristics
- Chamber size (diameter) – 600 mm, 700 mm, 1100 mm, 1500 mm
- Pumping System – Turbomolecular & Rotor pump
- Substrate diameter – Up to 250 mm
- Electron beam guns (EBS) – Up to 3 pcs.
- Ion/Plasma source – yes
- Quartz control – yes
- Optical monitoring) – Broadband or Single-wavelength
Evaporation materials
- Al2O3, HfO2, SiO2, TiO2, ZrO2, …
- MgF2, YF3 , AlF3, CaF2, PbF3, …
- Al, Cr, Ag, Au, Ge, Si, Mo, …
- Iodides / Nitride / Tellurides / Sulfides / Selenides …
Coatings
- Dielectric coatings
- Metallic coatings
- Hybrid coatings
- UV—VIS—NIR—LIR
- AR-coating
- HR–coating
- Beamsplitters
- Edge/Notch – filters
- Narrow bandpass filters
- Cold mirrors …
Applications
- Precision optics
Microoptic
Endoskopes
Polarizers
Filters
… - Laseroptic (High power)
CO2—Laser
Sensoric
Spectral system
Optoelectronics
…